【英文标准名称】:Surfacechemicalanalysis-High-resolutionAugerelectronspectrometers-Calibrationofenergyscalesforelementalandchemical-stateanalysis
【原文标准名称】:表面化学分析.高分辨率螺旋电子光谱仪.元素和化学状态分析用能量标度的校准
【标准号】:ISO17974-2002
【标准状态】:现行
【国别】:国际
【发布日期】:2002-10
【实施或试行日期】:
【发布单位】:国际标准化组织(IX-ISO)
【起草单位】:ISO/TC201
【标准类型】:()
【标准水平】:()
【中文主题词】:精整;螺旋电子光谱法;光谱测定法;校正;分光计;标度;含量测定;化学分析和试验
【英文主题词】:Augerelectronspectroscopy;Calibration;Chemicalanalysisandtesting;Determinationofcontent;Finishes;Scales;Spectrometers;Spectrometry
【摘要】:ThisInternationalStandardspecifiesamethodforcalibratingthekineticenergyscalesofAugerelectronspectrometersusedforelementalandchemicalstateanalysisatsurfaces.Italsospecifiesacalibrationschedulefortestingthekineticenergyscalelinearityatoneintermediateenergy,forconfirmingtheuncertaintyofthescalecalibrationatonelowandonehighkineticenergyvalue,forcorrectingforsmalldriftsofthatscaleandfordefiningtheexpandeduncertaintyofthecalibrationofthekineticenergyscalewithaconfidencelevelof95%(thisuncertaintyincludescontributionsforbehavioursobservedininterlaboratorystudiesbutdoesnotcoverallpossibledefects).Itisapplicableonlytothoseinstrumentsincorporatinganiongunforsputtercleaning.Itisnotapplicabletoinstrumentswithkineticenergyscaleerrorssignificantlynon-linearwithenergy.Neitheritisapplicabletothoseinstrumentsoperatedatrelativeresolutionspoorerthan0,2%intheconstant△EIEmodeor1,5eVintheconstant△Emode,thoserequiringtolerancelimitsof±0,05eVorless,nortothosewithanelectrongunthatcannotbeoperatedintheenergyrange5keVto10keV.Itdoesnotprovideafullcalibrationcheckforconfirmingtheenergymeasuredateachaddressablepointontheenergyscale,thisbeingperformedaccordingtothemanufacturer'srecommendations.
【中国标准分类号】:N51
【国际标准分类号】:71_040_40
【页数】:27P;A4
【正文语种】:英语